Metal Vapor Vacuum Arc Source / MEVVA Source

Cathodic vacuum arcs produce highly ionized plasmas from virtually all solid metallic elements.  As long as a material is sufficiently conducting to serve as an arc cathode, it can be used in a cathodic arc discharge.  Therefore, not only metals and alloys  (i.e. Al, Ti, Cu, Cr, Zr, Zn, Au, Ag, Co, Ni, V, Y, Nb, rare earth metals, so on) but also semi-metals (graphite) and highly-doped semiconductors (Si, Ge) can be used to produce plasmas from which ions can be extracted.  Cathodic arc plasmas are characterized by the presence of multiple charged ions.  Ions formed in the plasma can be extracted and accelerated by the strong electric field between the extraction electrodes and ion implanted into any kind of substrate materials. The extracted ion energy can be from 10keV to over 150keV. 

The MEVVA source is operated in pulse mode and touch screen controlled.

Model	MEVVA50
Operation Control	Touch Screen + PLC
Arc Discharge Mode	Pulse
Cathode Dimension	Diameter F10mm x Length 30mm
Cathode Erosion Compensation	Auto Push, Manual Push and Manual Pull
Cathode Cooling	Oil
Triggering Voltage	~20kV
Arc Discharge Voltage	0V - 100V (Adjustable)
Pulse Arc Discharge Current	50A - 200A
Discharge Pulse Width	0.2ms - 1.5ms (Adjustable)
Pulsing Frequency	0 - 20Hz  (Adjustable)
Operation Pressure	1 x 10e-2 Pa or Below
Beam Size (Flange Size Dependent)	F100mm - F300mm
Ion Beam Extracted Current	1mA - 10mA
Output Ion Voltage Range	20kV-50kV
Process Control Mode	Ion Dose or Pulse Number
Protection	Fault and Failure Alarm Emergency Stop
Grounding	Pneumatic Auto Grounding and Manual Grounding 1 Ohm or Below Grounding
Power Input	3-phase 380V+/-5%, 50/60Hz, 60A

Model	MEVVA80
Operation Control	Touch Screen + PLC
Arc Discharge Mode	Pulse
Cathode Dimension	Diameter F10mm x Length 30mm
Cathode Erosion Compensation	Auto Push, Manual Push and Manual Pull
Cathode Cooling	Oil
Triggering Voltage	~20kV
Arc Discharge Voltage	0 - 100V (Adjustable)
Pulse Arc Discharge Current	50A - 200A
Discharge Pulse Width	0.2ms - 1.5ms (Adjustable)
Pulsing Frequency	0 - 20Hz  (Adjustable)
Operation Pressure	1 x 10e-2 Pa or Below
Beam Size (Flange Size Dependent)	F100mm - F300mm
Ion Beam Extracted Current	1mA - 5mA
Output Ion Voltage Range	30kV-80kV
Process Control Mode	Ion Dose or Pulse Number
Protection	Fault and Failure Alarm Emergency Stop
Grounding	Pneumatic Auto Grounding and Manual Grounding 1 Ohm or Below Grounding
Power Input	3-phase 380V+/-5%, 50/60Hz, 60A

For additional product information and pricing contact our specialists at sales@plasmatechnol.com.

Download  "SRIM Software" This is a very good free software to calculate the ion projected range and ion distribution in the materials.