|
1000W / 1kW RF Power Supply / RF Generator 13.56MHz
Our solid-state design 13.56MHz RF generators provide state-of-the art technology of precise and repeatable power control, ultra-stable output and low cost of ownership. Coupled with our MN-10A Matching Networks, the power system performs extraordinarily well in plasma-based thin-film manufacturing processes.
The RF plasma generators can be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs, MEMs and data storage devices.
Our RF generators are protected against excessive Voltage Standing Wave Ratio (VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation
Technical Specifications
Output Power |
1000W |
Frequency |
13.56MHz |
Forward Power Metering |
+ /-1% Full Scale, +/-1% Reading |
Output Power Stability |
+/0.5% Long Term, +/-1%Watt |
Power Response Time |
<10ms |
Output Impedance |
50 Ohm |
VSWR |
<2.0 |
Harmonics |
-50 dBc |
Input Power |
AC220V, 47-63 Hz, 8A |
Output Connector |
N / UHF type |
Interface Connectors |
RS485, RS232 Modbus |
Display Content |
Control Mode, Power Setting, Forward Power,
Reflection Power, Output Status, Fault Status |
Protections |
Over Heat, Over Voltage, Over Current, VSWR |
Cooling |
Forced Air |
Cabinet Size |
480mm x 460mm x 88mm (2U) |
Weight |
15kG |
Download RF Products Brochure
Need help?
Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.
For other related products:
300W RF Generator
500W RF Generator
600W RF Generator
2000W RF Generator
5000W RF Generator
|