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  Power Supplies >> RF Generator and Matching Network >> 5000W / 5kW RF Power Supply / RF Generator 13.56MHz

5000W / 5kW RF Power Supply / RF Generator 13.56MHz



Our solid-state design 13.56MHz RF generators provide state-of-the art technology of precise and repeatable power control, ultra-stable output and low cost of ownership. Coupled with our MN-50A Matching Networks, the power system performs extraordinarily well in plasma-based thin-film manufacturing processes.


The RF plasma generators can be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs, MEMs and data storage devices.



Our RF generators are protected against excessive Voltage Standing Wave Ratio (VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation.




Technical Specifications 

Output Power




Forward Power Metering

+ /-1% Full Scale,  +/-1% Reading

Output Power Stability

+/0.5% Long Term, +/-1%Watt

Power Response Time


Output Impedance

50 Ohm




-50 dBc

Input Power

3 phase AC380V+/-5%, 50/60Hz, 20A

Output Connector

N / UHF type

Interface Connectors

RS485, RS232 Modbus

Display Content

Control Mode, Power Setting, Forward Power,

Reflection Power, Output Status, Fault Status


Over Heat, Over Voltage, Over Current, VSWR


Water Cooling

Cabinet Size

480mm x 500mm x 133mm (3U)




Download RF Products Brochure 



Need help?

Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.




For other related products:


300W RF Generator


500W RF Generator


600W RF Generator


1000W RF Generator


2000W RF Generator



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