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  Power Supplies >> RF Generator and Matching Network >> MN-50A RF Auto Matching Network
 

MN-50A RF Auto Matching Network

           

PTL versatile Auto Impedance Matching Networks provide efficient, accurate, reliable and quick matching across RF generators to precisely match the complex impedance of a plasma to a desired tuning range.

 

Parameters

PTL Automatic Matching Network

Traditional Manual Matching Controller

Core Devices

Vacuum Adjustable Capacitor

Air Adjustable Capacitor

Lifetime

More Than 10 Years

More Than 5 Years

Continuous Working Time

24 Hours

24 Hours

Power Stability

+/- 1%

+/- 5%

Safety

High Safety

Maybe Discharge if Under Humidity

Maneuver Ability

Adjusting Automatically

Take Time for Manual Adjusting

Matching Time

Less Than 3 Seconds

5 Minutes or More

Reflected Power

Less Than 5 Watts

Less Than 30 Watts

 

  

The installation of the matching network is virtually plug-and-play with our 5000W RF power generators.

 

 

Equipped with microprocessor-controlled stepper motor drives and advanced fuzzy logic tuning algorithms, the matching network rapidly transforms plasma impedances to 50 ohms to maximize power transfer to the process chamber and provides greater consistency and accuracy than traditional analog-based tuning methods. The result is optimized RF power to semiconductor, solar, FPD, and MEMs manufacturing plasma processes, including etch, PVD, PECVD, HDPCVD, ALD and chamber clean applications.

 

Technical Specifications

Main Technical Properties

Model

MN-50A

Frequency

13.56MHz

Maximum Transmission Power

5000W

Reflected Power (Under Maximum Positive Power Output)

< 5W

Input Impedance

50 Ohm

Automatic Matching Time

0.2 - 1 second

Auto/Manual Function

Yes

Range of the Matched Impedance

(2~45) Ohm - j(0~70) Ohm

Adjustable Capacitor

Adjustable Capacitor (1%-100%)

RF Input Connector

50 Ohm, L16

RF Output Connector

50 Ohm, SL16 or Copper bar Output

Cooling Mode

Water

AC Power Supply

100-240VAC

AC Frequency

50/60 Hz

Weight

~12kg

Size

402*260*138(Width*Depth*Height)mm

 

Need help?

Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.


 

 

 

 

 

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