MN-10A RF Auto Matching Network
PTL versatile Auto Impedance Matching Networks provide efficient, accurate, reliable and quick matching across RF generators to precisely match the complex impedance of a plasma to a desired tuning range.
Parameters |
PTL Automatic Matching Network |
Traditional Manual Matching Controller |
Core Devices |
Vacuum Adjustable Capacitor |
Air Adjustable Capacitor |
Lifetime |
More Than 10 Years |
More Than 5 Years |
Continuous Working Time |
24 Hours |
24 Hours |
Power Stability |
+/- 1% |
+/- 5% |
Safety |
High Safety |
Maybe Discharge if Under Humidity |
Maneuver Ability |
Adjusting Automatically |
Take Time for Manual Adjusting |
Matching Time |
Less Than 3 Seconds |
5 Minutes or More |
Reflected Power |
Less Than 5 Watts |
Less Than 30 Watts |
The installation of the matching network is virtually plug-and-play with our 500W RF power generator, and 1000W RF power generator.
Equipped with microprocessor-controlled stepper motor drives and advanced fuzzy logic tuning algorithms, the matching network rapidly transforms plasma impedances to 50 ohms to maximize power transfer to the process chamber and provides greater consistency and accuracy than traditional analog-based tuning methods. The result is optimized RF power to semiconductor, solar, FPD, and MEMs manufacturing plasma processes, including etch, PVD, PECVD, HDPCVD, ALD and chamber clean applications.
Technical Specifications
Main Technical Properties |
Model |
MN-10A |
Frequency |
13.56MHz |
Maximum Transmission Power |
1000W |
Reflected Power (Under Maximum Positive Power Output) |
< 5W |
Input Impedance |
50 Ohm |
Automatic Matching Time |
0.2 - 1 second |
Auto/Manual Function |
Yes |
Range of the Matched Impedance |
(2~45) Ohm - j(0~70) Ohm |
Adjustable Capacitor |
Adjustable Capacitor (1%-100%) |
RF Input Connector |
N / UHF type |
RF Output Connector |
50 Ohm, N-type or UHF-type or Copper bar Output |
Cooling Mode |
Air Cooling |
AC Power Supply |
100-240VAC |
AC Frequency |
50/60 Hz |
Weight |
~8kg |
Size |
390*260*132.5(Length*Width*Height)mm |
Download RF Products Brochure
Need help?
Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.
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