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  Plasma and Ion Sources >> Grided Gas Ion Source
 

Grided Gas Ion Source

 

                            

          

  • Reactive gas compatible
  • Ion beam etching and sputtering
  • Ion beam assisted deposition
  • In-situ ion beam pre-cleaning in a static processing system
  • Direct deposition of thin films (e.g., DLC using hydrocarbon based gases)
  • Industrial, low maintenance design 

                          

 

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